(DOWNLOAD) "BioNanoFluidic MEMS" by Peter J. Hesketh ~ Book PDF Kindle ePub Free
eBook details
- Title: BioNanoFluidic MEMS
- Author : Peter J. Hesketh
- Release Date : January 15, 2007
- Genre: Engineering,Books,Professional & Technical,Science & Nature,Life Sciences,
- Pages : * pages
- Size : 7540 KB
Description
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS
BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
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